Cascaded machine learning model for reconstruction of surface topography from light scattering
(2020)
Journal Article
Liu, M., Senin, N., Su, R., & Leach, R. (2020). Cascaded machine learning model for reconstruction of surface topography from light scattering. Proceedings of SPIE, 11352, https://doi.org/10.1117/12.2555035
Light scattering methods are promising for in-process surface measurement. Many researchers have investigated light scattering methods for evaluating surface texture. Researchers working on scatterometry have developed methods to derive surface textu... Read More about Cascaded machine learning model for reconstruction of surface topography from light scattering.