Does interferometry work? A critical look at the foundations of interferometric surface topography measurement

de Groot, Peter J.; Colonna de Lega, Xavier; Su, Rong; Leach, Richard K.

Abstract

© 2019 SPIE. Interferometers for the measurement of surface form and texture have a reputation for high performance. However, the results for many types of surface features can deviate from the expectation of one cycle of phase shift per half wavelength of surface height. Here we review the fundamentals of imaging interferometry and describe ways of defining instrument response, including the linear instrument transfer function. These considerations define practical regimes of linear behavior that are usually satisfied for traditional uses of interferometers; but that are increasingly challenged by applications involving complex textures and high surface slopes. We conclude by proposing pathways for further improving performance on difficult surface structures using advanced modeling techniques.

Citation

de Groot, P. J., Colonna de Lega, X., Su, R., & Leach, R. K. (2019, August). Does interferometry work? A critical look at the foundations of interferometric surface topography measurement. Presented at Applied Optical Metrology III, San Diego, United States

• Presentation Conference Type: Conference Paper (published)
• Conference Name: Applied Optical Metrology III
• Start Date: Aug 11, 2019
• End Date: Aug 15, 2019
• Acceptance Date: Apr 8, 2019
• Publication Date: Sep 3, 2019
• Deposit Date: Sep 9, 2019
• Publicly Available Date: Sep 10, 2019
• Journal: Proceedings of SPIE - The International Society for Optical Engineering
• Print ISSN: 0277-786X
• Electronic ISSN: 1996-756X
• Publisher: Society of Photo-optical Instrumentation Engineers
• Peer Reviewed: Peer Reviewed
• Volume: 11102
• Article Number: 111020G
• DOI: https://doi.org/10.1117/12.2526654
• Keywords: Interferometry, Diffraction, Interference, Instrument transfer function, Optical transfer function, Metrology
• Public URL: https://nottingham-repository.worktribe.com/output/2592597
• Publisher URL: https://www.spiedigitallibrary.org/conference-proceedings-of-spie/11102/2526654/Does-interferometry-work-A-critical-look-at-the-foundations-of/10.1117/12.2526654.short
• Additional Information: Copyright 2019 Society of Photo-Optical Instrumentation Engineers. One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.
• Contract Date: Sep 9, 2019