Comparison of Fourier optics-based methods for modeling coherence scanning interferometry

Hooshmand, Helia; Pahl, Tobias; de Groot, Peter J.; Lehmann, Peter; Pappas, Athanasios; Su, Rong; Leach, Richard; Piano, Samanta

Abstract

Coherence scanning interferometry (CSI) is a widely used optical method for surface topography measurement of industrial and biomedical surfaces. The operation of CSI can be modeled using approximate physics-based approaches with minimal computational effort. A critical aspect of CSI modeling is defining the transfer function for the imaging properties of the instrument to predict the interference fringes from which topography information is extracted. Approximate methods, for example, elementary Fourier optics, universal Fourier optics, and foil models, use scalar diffraction theory and the imaging properties of the optical system to model CSI surface topography measurement. In this work, the simulated topographies of different surfaces, including various sinusoids, two posts, and a step height, calculated using the three example methods are compared. The presented results illustrate the agreement between the three example models.

Citation

Hooshmand, H., Pahl, T., de Groot, P. J., Lehmann, P., Pappas, A., Su, R., …Piano, S. (2024). Comparison of Fourier optics-based methods for modeling coherence scanning interferometry. Optical Engineering, 63(4), Article 044102. https://doi.org/10.1117/1.OE.63.4.044102

• Journal Article Type: Article
• Acceptance Date: Mar 28, 2024
• Online Publication Date: Apr 12, 2024
• Publication Date: 2024-04
• Deposit Date: Apr 11, 2024
• Publicly Available Date: Apr 16, 2024
• Journal: Optical Engineering
• Print ISSN: 0091-3286
• Electronic ISSN: 1560-2303
• Publisher: Society of Photo-optical Instrumentation Engineers
• Peer Reviewed: Peer Reviewed
• Volume: 63
• Issue: 4
• Article Number: 044102
• DOI: https://doi.org/10.1117/1.OE.63.4.044102
• Keywords: Surface topography, CSI, scattering, transfer function
• Public URL: https://nottingham-repository.worktribe.com/output/33563279
• Publisher URL: https://www.spiedigitallibrary.org/journals/optical-engineering/volume-63/issue-04/044102/Comparison-of-Fourier-optics-based-methods-for-modeling-coherence-scanning/10.1117/1.OE.63.4.044102.full#_=_