Modeling of interference microscopy beyond the linear regime

Thomas, Matthew; Su, Rong; Nikolaev, Nikolay; Coupland, Jeremy; Leach, Richard

Abstract

Coherence scanning interferometry (CSI), a type of interference microscopy, has found broad applications in advanced manufacturing industry providing high-accuracy surface topography measurement. Enhancement of the metrological capability of CSI for complex surfaces, such as those featuring high slopes and spatial frequencies and high aspect-ratio structures, requires advances in modelling of CSI. However, current linear CSI models relying on approximate surface scattering models cannot accurately predict the instrument response for surfaces with complex geometries that cause multiple scattering. In this paper, a boundary elements method is used as a rigorous scattering model to calculate the scattered field at a distant boundary. Then, the CSI signal is calculated by considering the holographic recording and reconstruction of the scattered field. Through this approach, the optical response of a CSI system can be predicted for almost any arbitrary surface geometry.

Citation

Thomas, M., Su, R., Nikolaev, N., Coupland, J., & Leach, R. (2020). Modeling of interference microscopy beyond the linear regime. Optical Engineering, 59(3), https://doi.org/10.1117/1.oe.59.3.034110

• Journal Article Type: Article
• Acceptance Date: Mar 13, 2020
• Online Publication Date: Mar 25, 2020
• Publication Date: Mar 25, 2020
• Deposit Date: Mar 19, 2020
• Publicly Available Date: Mar 25, 2020
• Journal: Optical Engineering
• Print ISSN: 0091-3286
• Electronic ISSN: 1560-2303
• Publisher: Society of Photo-optical Instrumentation Engineers
• Peer Reviewed: Peer Reviewed
• Volume: 59
• Issue: 3
• Article Number: 034110
• DOI: https://doi.org/10.1117/1.oe.59.3.034110
• Keywords: interference microscopy; optical modelling; surface scattering; computational electromagnetics; boundary element method
• Public URL: https://nottingham-repository.worktribe.com/output/4169732
• Publisher URL: https://www.spiedigitallibrary.org/journals/optical-engineering/volume-59/issue-03/034110/Modeling-of-interference-microscopy-beyond-the-linear-regime/10.1117/1.OE.59.3.034110.full?SSO=1