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Noise reduction in coherence scanning interferometry for surface topography measurement

Gomez, Carlos; Su, Rong; De Groot, Peter; Leach, Richard


Carlos Gomez

Rong Su

Peter De Groot


Coherence scanning interferometry is one of the most accurate surface measuring technology, and it is increasingly applied to challenging surface structures, such as additive manufactured part and transparent films, directly in environments that resemble production areas more than metrology labs. Environmental disturbances may further compromise measurement accuracy. Data acquisition strategies to reduce measurement noise in coherence scanning interferometry include averaging a sequence of repeated topography measurements or increasing the sampling frequency of the fringe signal during a single data acquisition-sometimes referred to as oversampling. In this paper, we improve the understanding of the mechanisms of the two noise reduction methods and compare their effects on surface topography measurement in the presence of environment-induced vibration. The results provide guidance for good practice in the reduction of uncertainty in surface measurement for a wide range of applications.


Gomez, C., Su, R., De Groot, P., & Leach, R. (2020). Noise reduction in coherence scanning interferometry for surface topography measurement. Nanomanufacturing and Metrology, 3, 68–76.

Journal Article Type Article
Acceptance Date Feb 27, 2020
Online Publication Date Mar 10, 2020
Publication Date 2020-03
Deposit Date Mar 6, 2020
Publicly Available Date Mar 10, 2020
Journal Nanomanufacturing and Metrology
Print ISSN 2520-811X
Electronic ISSN 2520-8128
Publisher Springer
Peer Reviewed Peer Reviewed
Volume 3
Pages 68–76
Public URL
Publisher URL


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