Professor RICHARD LEACH RICHARD.LEACH@NOTTINGHAM.AC.UK
CHAIR IN METROLOGY
Real-time target alignment system for high-power high-repetition rate laser operations using a five degree-of-freedom hybrid mechanism
Leach, Richard; Branson, David; Karim, Shah; Tolley, Martin; Piano, Samanta; Santoso, Teguh
Authors
Professor David Branson DAVID.BRANSON@NOTTINGHAM.AC.UK
PROFESSOR OF DYNAMICS AND CONTROL
Shah Karim
Martin Tolley
Professor SAMANTA PIANO SAMANTA.PIANO@NOTTINGHAM.AC.UK
PROFESSOR OF METROLOGY
Teguh Santoso
Abstract
This paper presents a real-time position control solution for the targets used in the high-repetition rate laser operations of high-power laser facilities. The control system is designed based on an Abbe-compliant, in-process position measurement system of targets, employing a plane mirror interferometer and a five degree-of-freedom hybrid mechanism. An error model is developed to characterise the position feedback information of target for a high-repetition rate process to determine the effects of the non-collocation of the sensor’s measurement point and target on the control system’s performance– a challenge for the real-time position control of targets. Behaviour of the control system is investigated with the error model and experimental data. It is found that a controller’s position compensation scheme can be ineffective due to the erroneous position feedback as a result of the non-linear position information associated with the non-collocated measurement point and the actual target. To solve the problem, an angular compensation technique is proposed.
Citation
Leach, R., Branson, D., Karim, S., Tolley, M., Piano, S., & Santoso, T. (2020). Real-time target alignment system for high-power high-repetition rate laser operations using a five degree-of-freedom hybrid mechanism. International Journal of Control, 95(4), 867-885. https://doi.org/10.1080/00207179.2020.1827297
Journal Article Type | Article |
---|---|
Acceptance Date | Sep 13, 2020 |
Online Publication Date | Dec 4, 2020 |
Publication Date | Apr 3, 2020 |
Deposit Date | Mar 24, 2021 |
Publicly Available Date | Apr 14, 2021 |
Journal | International Journal of Control |
Print ISSN | 0020-7179 |
Electronic ISSN | 1366-5820 |
Publisher | Taylor and Francis |
Peer Reviewed | Peer Reviewed |
Volume | 95 |
Issue | 4 |
Pages | 867-885 |
DOI | https://doi.org/10.1080/00207179.2020.1827297 |
Keywords | real-time position and orientation control; in-process metrology; hybrid mechanism; Abbe error; error model; closed-loop control; target position feedback; position and angular compensation; complaint and non-complaint feedback information |
Public URL | https://nottingham-repository.worktribe.com/output/4959033 |
Publisher URL | https://www.tandfonline.com/doi/full/10.1080/00207179.2020.1827297 |
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Real-time target alignment system for high-power high-repetition rate laser operations using a five degree-of-freedom hybrid mechanism
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Publisher Licence URL
https://creativecommons.org/licenses/by/4.0/
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