High-precision lateral distortion measurement and correction in coherence scanning interferometry using an arbitrary surface
(2017)
Journal Article
Ekberg, P., Su, R., & Leach, R. K. (2017). High-precision lateral distortion measurement and correction in coherence scanning interferometry using an arbitrary surface. Optics Express, 25(16), https://doi.org/10.1364/OE.25.018703
Lateral optical distortion is present in most optical imaging systems. In coherence scanning interferometry, distortion may cause field-dependent systematic errors in the measurement of surface topography. These errors become critical when high-preci... Read More about High-precision lateral distortion measurement and correction in coherence scanning interferometry using an arbitrary surface.