Optical difference engine for defect inspection in highly-parallel manufacturing processes

Feng, Xiaobing; Su, Rong; Liu, Mingyu; Leach, Richard K.

Abstract

Traditional defect inspection for highly-parallel manufacturing processes requires the processing of large measurement datasets, which is often not fast enough for in-situ inspection of large areas with high resolution. This study develops an all-optical difference engine for fast defect detection in highly-parallel manufacturing processes, where the detection of defects (differences from nominal) is performed optically and in real-time. Identification of defects is achieved through an optical Fourier transform and spatial filtering, detecting differences between two real objects by nulling information that is repeated in each object. The developed prototype device is demonstrated using geometric patterns of similar scale to components in printed electronic circuits

Citation

Feng, X., Su, R., Liu, M., & Leach, R. K. Optical difference engine for defect inspection in highly-parallel manufacturing processes. Presented at 12th International Conference and Exhibition on Laser Metrology, Coordinate Measuring Machine and Machine Tool Performance, (LAMDAMAP 2017)

• Conference Name: 12th International Conference and Exhibition on Laser Metrology, Coordinate Measuring Machine and Machine Tool Performance, (LAMDAMAP 2017)
• End Date: Mar 16, 2017
• Acceptance Date: Feb 21, 2017
• Publication Date: Mar 15, 2017
• Deposit Date: Apr 26, 2017
• Publicly Available Date: Apr 26, 2017
• Peer Reviewed: Peer Reviewed
• Public URL: https://nottingham-repository.worktribe.com/output/850391
• Related Public URLs: https://www.researchgate.net/publication/314184991_Optical_difference_engine_for_defect_inspection_in_highly-parallel_manufacturing_processes
• Contract Date: Apr 26, 2017