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Optical difference engine for defect inspection in highly-parallel manufacturing processes

Feng, Xiaobing; Su, Rong; Liu, Mingyu; Leach, Richard K.

Authors

Xiaobing Feng

Mingyu Liu

Richard K. Leach



Abstract

Traditional defect inspection for highly-parallel manufacturing processes requires the processing of large measurement datasets, which is often not fast enough for in-situ inspection of large areas with high resolution. This study develops an all-optical difference engine for fast defect detection in highly-parallel manufacturing processes, where the detection of defects (differences from nominal) is performed optically and in real-time. Identification of defects is achieved through an optical Fourier transform and spatial filtering, detecting differences between two real objects by nulling information that is repeated in each object. The developed prototype device is demonstrated using geometric patterns of similar scale to components in printed electronic circuits

Publication Date Mar 15, 2017
Peer Reviewed Peer Reviewed
APA6 Citation Feng, X., Su, R., Liu, M., & Leach, R. K. (2017). Optical difference engine for defect inspection in highly-parallel manufacturing processes
Related Public URLs https://www.researchgate.net/publication/314184991_Optical_difference_engine_for_defect_inspection_in_highly-parallel_manufacturing_processes
Copyright Statement Copyright information regarding this work can be found at the following address: http://eprints.nottingh.../end_user_agreement.pdf

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Copyright Statement
Copyright information regarding this work can be found at the following address: http://eprints.nottingham.ac.uk/end_user_agreement.pdf





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