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High-precision lateral distortion correction in coherence scanning interferometry using an arbitrary surface

Su, Rong; Ekberg, Peter; Leach, Richard K.

Authors

Rong Su

Peter Ekberg

Richard K. Leach



Publication Date Apr 24, 2017
Peer Reviewed Peer Reviewed
APA6 Citation Su, R., Ekberg, P., & Leach, R. K. (2017). High-precision lateral distortion correction in coherence scanning interferometry using an arbitrary surface
Related Public URLs https://www.researchgate.net/publication/316428152
Copyright Statement Copyright information regarding this work can be found at the following address: http://eprints.nottingh.../end_user_agreement.pdf

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Copyright Statement
Copyright information regarding this work can be found at the following address: http://eprints.nottingham.ac.uk/end_user_agreement.pdf





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