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High-precision lateral distortion correction in coherence scanning interferometry using an arbitrary surface

Su, Rong; Ekberg, Peter; Leach, Richard K.

Authors

Rong Su

Peter Ekberg

Richard K. Leach



Citation

Su, R., Ekberg, P., & Leach, R. K. (2017). High-precision lateral distortion correction in coherence scanning interferometry using an arbitrary surface.

Conference Name 2017 ASPE Topical Meeting: Precision Engineering and Optics: What are the limits of precision, and how to characterize them?
End Date Apr 25, 2017
Acceptance Date Feb 1, 2017
Publication Date Apr 24, 2017
Deposit Date Apr 26, 2017
Publicly Available Date Apr 26, 2017
Peer Reviewed Peer Reviewed
Public URL https://nottingham-repository.worktribe.com/output/857259
Related Public URLs https://www.researchgate.net/publication/316428152

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