High-precision lateral distortion correction in coherence scanning interferometry using an arbitrary surface

Su, Rong; Ekberg, Peter; Leach, Richard K.

High-precision lateral distortion correction in coherence scanning interferometry using an arbitrary surface

Su, Rong; Ekberg, Peter; Leach, Richard K.

Authors

Rong Su

Peter Ekberg

Richard K. Leach

Citation

Su, R., Ekberg, P., & Leach, R. K. High-precision lateral distortion correction in coherence scanning interferometry using an arbitrary surface. Presented at 2017 ASPE Topical Meeting: Precision Engineering and Optics: What are the limits of precision, and how to characterize them?

Conference Name	2017 ASPE Topical Meeting: Precision Engineering and Optics: What are the limits of precision, and how to characterize them?
End Date	Apr 25, 2017
Acceptance Date	Feb 1, 2017
Publication Date	Apr 24, 2017
Deposit Date	Apr 26, 2017
Publicly Available Date	Apr 26, 2017
Peer Reviewed	Peer Reviewed
Public URL	https://nottingham-repository.worktribe.com/output/857259
Related Public URLs	https://www.researchgate.net/publication/316428152
Contract Date	Apr 26, 2017