Rong Su
High-precision lateral distortion correction in coherence scanning interferometry using an arbitrary surface
Su, Rong; Ekberg, Peter; Leach, Richard K.
Authors
Peter Ekberg
Richard K. Leach
Citation
Su, R., Ekberg, P., & Leach, R. K. (2017). High-precision lateral distortion correction in coherence scanning interferometry using an arbitrary surface.
Conference Name | 2017 ASPE Topical Meeting: Precision Engineering and Optics: What are the limits of precision, and how to characterize them? |
---|---|
End Date | Apr 25, 2017 |
Acceptance Date | Feb 1, 2017 |
Publication Date | Apr 24, 2017 |
Deposit Date | Apr 26, 2017 |
Publicly Available Date | Mar 29, 2024 |
Peer Reviewed | Peer Reviewed |
Public URL | https://nottingham-repository.worktribe.com/output/857259 |
Related Public URLs | https://www.researchgate.net/publication/316428152 |
Files
ASPE_ExAbstract_v4.2.pdf
(2 Mb)
PDF
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