Lens aberration compensation in interference microscopy
(2020)
Journal Article
Su, R., Thomas, M., Liu, M., Drs, J., Bellouard, Y., Pruss, C., …Leach, R. (2020). Lens aberration compensation in interference microscopy. Optics and Lasers in Engineering, 128, Article 106015. https://doi.org/10.1016/j.optlaseng.2020.106015
Emergence of products that feature functional surfaces with complex geometries, such as freeform optics in consumer electronics and augmented reality and virtual reality, requires high-accuracy non-contact surface measurement. However, large discrepa... Read More about Lens aberration compensation in interference microscopy.