Numerical modelling of MPA-CVD reactors with the discontinuous Galerkin finite element method
(2017)
Journal Article
In this article we develop a fully self consistent mathematical model describing the formation of a hydrogen plasma in a microwave power assisted chemical vapour deposition (MPA-CVD) reactor employed for the manufacture of synthetic diamond. The unde... Read More about Numerical modelling of MPA-CVD reactors with the discontinuous Galerkin finite element method.