Numerical modelling of MPA-CVD reactors with the discontinuous Galerkin finite element method

Houston, Paul; Sime, Nathan

Abstract

In this article we develop a fully self consistent mathematical model describing the formation of a hydrogen plasma in a microwave power assisted chemical vapour deposition (MPA-CVD) reactor employed for the manufacture of synthetic diamond. The underlying multi-physics model includes constituent equations for the background gas mass average velocity, gas temperature, electromagnetic field energy and plasma density. The proposed mathematical model is numerically approximated based on exploiting the discontinuous Galerkin finite element method. We demonstrate the practical performance of this computational approach on a variety of CVD reactor geometries for a range of operating conditions.

Citation

Houston, P., & Sime, N. (2017). Numerical modelling of MPA-CVD reactors with the discontinuous Galerkin finite element method. Journal of Physics D: Applied Physics, 50(29), Article 295202. https://doi.org/10.1088/1361-6463/aa77dc

• Journal Article Type: Article
• Acceptance Date: Jun 7, 2017
• Publication Date: Jul 3, 2017
• Deposit Date: Jun 8, 2017
• Publicly Available Date: Jul 3, 2017
• Journal: Journal of Physics D: Applied Physics
• Print ISSN: 0022-3727
• Electronic ISSN: 1361-6463
• Publisher: IOP Publishing
• Peer Reviewed: Peer Reviewed
• Volume: 50
• Issue: 29
• Article Number: 295202
• DOI: https://doi.org/10.1088/1361-6463/aa77dc
• Keywords: MPA-CVD modelling, Finite element methods, Discontinuous Galerkin methods
• Public URL: https://nottingham-repository.worktribe.com/output/870902
• Publisher URL: http://iopscience.iop.org/article/10.1088/1361-6463/aa77dc/meta;
• Additional Information: This is an author-created, un-copyedited version of an article accepted for publication in Journal of Physics D: Applied Physics. The publisher is not responsible for any errors or omissions in this version of the manuscript or any version derived from it. The Version of Record is available online at
• Contract Date: Jun 8, 2017