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Reactive laser annealing of indium tin oxide: implications to crystal structure, defect composition, and plasma energy (2022)
Journal Article

The mechanisms governing the modification of the optoelectronic properties of low carrier concentration indium tin oxide (ITO) during reactive laser annealing (ReLaA) are investigated. ReLA combines the advantages of reactive ambient thermal annealin... Read More about Reactive laser annealing of indium tin oxide: implications to crystal structure, defect composition, and plasma energy.