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Photo-engineered optoelectronic properties of indium tin oxide via reactive laser annealing

Hillier, James Arthur; Patsalas, Panos; Karfaridis, Dimitrios; Camelio, Sophie; Cranton, Wayne; Nabok, Alexei V.; Mellor, Christopher J.; Koutsogeorgis, Demosthenes C.; Kalfagiannis, Nikolaos


James Arthur Hillier

Panos Patsalas

Dimitrios Karfaridis

Sophie Camelio

Wayne Cranton

Alexei V. Nabok

Demosthenes C. Koutsogeorgis

Nikolaos Kalfagiannis


Transparent conductive oxides are appealing materials for optoelectronic and plasmonic applications as, amongst other advantages, their properties can be modulated by engineering their defects. Optimisation of this adjustment is, however, a complex design problem. This work examined the modification of the carrier transport properties of sputtered tin-doped indium oxide (ITO) via laser annealing in reactive environments. We relate the optical modifications to the structural, compositional, and electronic properties to elucidate the precise mechanisms behind the reactive laser annealing (ReLA) process. For sufficiently high laser fluence, we reveal an ambient-dependent and purely compositional modulation of the carrier concentration of ITO thin films. Hereby, we demonstrate that ReLA utilises the precise energy delivery of photonic processing to enhance the carrier mobility and finely tune the carrier concentration without significantly affecting the crystal structure. Exploitation of this phenomena may enable one to selectively engineer the optoelectronic properties of ITO, promising an alternative to the exploration of new materials for optoelectronic and photonic applications.


Hillier, J. A., Patsalas, P., Karfaridis, D., Camelio, S., Cranton, W., Nabok, A. V., …Kalfagiannis, N. (2022). Photo-engineered optoelectronic properties of indium tin oxide via reactive laser annealing. Scientific Reports, 12, Article 14986.

Journal Article Type Article
Acceptance Date Aug 22, 2022
Online Publication Date Sep 2, 2022
Publication Date Sep 2, 2022
Deposit Date Sep 26, 2022
Publicly Available Date Sep 27, 2022
Journal Scientific Reports
Electronic ISSN 2045-2322
Publisher Nature Publishing Group
Peer Reviewed Peer Reviewed
Volume 12
Article Number 14986
Keywords Multidisciplinary
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Photo-engineered optoelectronic properties of indium tin oxide via reactive laser annealing (2.8 Mb)

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