James Hillier
Reactive laser annealing of indium tin oxide: implications to crystal structure, defect composition, and plasma energy
Hillier, James; Patsalas, Panos; Karfardis, Dimitrios; Cranton, Wayne; Nabok, Alexei; Mellor, Christopher J.; Koutsogeorgis, Demosthenes; Kalfagiannis, Nikolaos
Authors
Panos Patsalas
Dimitrios Karfardis
Wayne Cranton
Alexei Nabok
CHRISTOPHER MELLOR chris.mellor@nottingham.ac.uk
Associate Professor and Reader in Physics
Demosthenes Koutsogeorgis
Nikolaos Kalfagiannis
Abstract
The mechanisms governing the modification of the optoelectronic properties of low carrier concentration indium tin oxide (ITO) during reactive laser annealing (ReLaA) are investigated. ReLA combines the advantages of reactive ambient thermal annealing and laser annealing; utilizing laser processing of room-temperature sputtered ITO thin films in pressurized reactive environments to probe the films’ crystal structure and defect composition. Advanced ellipsometric modelling (considering depth-inhomogeneity and intra- and inter-grain carrier transport), cross-sectional transmission electron microscopy, and X-ray photoelectron spectroscopy revealed ReLA-induced depth-dependent compositional and structural modifications that tuned the carrier concentration ((0.3 − 1.27) × 1020 cm−3) and epsilon-near-zero domain ( 3.07 − 11.7 μ m ) across a wider range than previously reported.
Citation
Hillier, J., Patsalas, P., Karfardis, D., Cranton, W., Nabok, A., Mellor, C. J., …Kalfagiannis, N. (2022). Reactive laser annealing of indium tin oxide: implications to crystal structure, defect composition, and plasma energy. Optical Materials Express, 12(11), 4310-4327. https://doi.org/10.1364/ome.464918
Journal Article Type | Article |
---|---|
Acceptance Date | Aug 22, 2022 |
Online Publication Date | Oct 13, 2022 |
Publication Date | Nov 1, 2022 |
Deposit Date | Sep 26, 2022 |
Journal | Optical Materials Express |
Electronic ISSN | 2159-3930 |
Publisher | Optical Society of America |
Peer Reviewed | Peer Reviewed |
Volume | 12 |
Issue | 11 |
Pages | 4310-4327 |
DOI | https://doi.org/10.1364/ome.464918 |
Keywords | Electronic, Optical and Magnetic Materials |
Public URL | https://nottingham-repository.worktribe.com/output/11745653 |
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