Does interferometry work? A critical look at the foundations of interferometric surface topography measurement
(2019)
Presentation / Conference Contribution
de Groot, P. J., Colonna de Lega, X., Su, R., & Leach, R. K. (2019, August). Does interferometry work? A critical look at the foundations of interferometric surface topography measurement. Presented at Applied Optical Metrology III, San Diego, United States
© 2019 SPIE. Interferometers for the measurement of surface form and texture have a reputation for high performance. However, the results for many types of surface features can deviate from the expectation of one cycle of phase shift per half wavelen... Read More about Does interferometry work? A critical look at the foundations of interferometric surface topography measurement.