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Determination of the lateral resolution of an interference microsope using a micro-scale sphere

Su, Rong; Thomas, Matthew; De Groot, Peter; Coupland, Jeremy; Leach, Richard

Authors

Matthew Thomas

Peter De Groot

Jeremy Coupland



Start Date Nov 4, 2018
Publication Date Nov 4, 2018
Book Title Proceedings of the 33rd Annual Meeting of the American Society for Precision Engineering, Las Vegas, 4-9 November 2018
APA6 Citation Su, R., Thomas, M., De Groot, P., Coupland, J., & Leach, R. (2018). Determination of the lateral resolution of an interference microsope using a micro-scale sphere. In Proceedings of the 33rd Annual Meeting of the American Society for Precision Engineering, Las Vegas, 4-9 November 2018

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