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Determination of the lateral resolution of an interference microsope using a micro-scale sphere

Su, Rong; Thomas, Matthew; De Groot, Peter; Coupland, Jeremy; Leach, Richard

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Authors

Rong Su

Matthew Thomas

Peter De Groot

Jeremy Coupland



Conference Name 33rd Annual Meeting of the American Society for Precision Engineering
Start Date Nov 4, 2018
End Date Nov 9, 2018
Acceptance Date May 26, 2018
Online Publication Date Nov 4, 2018
Publication Date Nov 4, 2018
Deposit Date Nov 28, 2018
Publicly Available Date Nov 28, 2018
Book Title Proceedings of the 33rd Annual Meeting of the American Society for Precision Engineering, Las Vegas, 4-9 November 2018
Public URL https://nottingham-repository.worktribe.com/output/1316655

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