Rong Su
Determination of the lateral resolution of an interference microsope using a micro-scale sphere
Su, Rong; Thomas, Matthew; De Groot, Peter; Coupland, Jeremy; Leach, Richard
Authors
Matthew Thomas
Peter De Groot
Jeremy Coupland
RICHARD LEACH richard.leach@nottingham.ac.uk
Chair in Metrology
Citation
Su, R., Thomas, M., De Groot, P., Coupland, J., & Leach, R. (2018). Determination of the lateral resolution of an interference microsope using a micro-scale sphere. In Proceedings of the 33rd Annual Meeting of the American Society for Precision Engineering, Las Vegas, 4-9 November 2018
| Conference Name | 33rd Annual Meeting of the American Society for Precision Engineering |
|---|---|
| Start Date | Nov 4, 2018 |
| End Date | Nov 9, 2018 |
| Acceptance Date | May 26, 2018 |
| Online Publication Date | Nov 4, 2018 |
| Publication Date | Nov 4, 2018 |
| Deposit Date | Nov 28, 2018 |
| Publicly Available Date | Nov 28, 2018 |
| Book Title | Proceedings of the 33rd Annual Meeting of the American Society for Precision Engineering, Las Vegas, 4-9 November 2018 |
| Public URL | https://nottingham-repository.worktribe.com/output/1316655 |
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