All-optical difference engine for in-process defect inspection for roll-to-roll printed electronics

Feng, Xiaobing; Su, Rong; Happonen, Tuomas; Liu, Jian; Leach, Richard

Abstract

© 2019 SPIE. The increasing capabilities of roll-to-roll (R2R) printing processes present challenges for quality control, requiring inprocess inspection of large substrates with high resolution at high speed. In this paper, an all-optical difference engine (AODE) sensor has been developed for in-process defect inspection for R2R printed electronics. The AODE sensor achieves high-speed inspection by utilising the principle of coherent optical subtraction to minimise data processing. The capability of the developed sensor is demonstrated using industrial printed electrical circuity samples and the sensor is capable of inspecting areas of 4 mm width with a resolution of the order of several micrometres.

Citation

Feng, X., Su, R., Happonen, T., Liu, J., & Leach, R. (2018, August). All-optical difference engine for in-process defect inspection for roll-to-roll printed electronics. Presented at 10th International Symposium on Precision Engineering Measurements and Instrumentation (ISPEMI 2018), Kunming, China

• Presentation Conference Type: Edited Proceedings
• Conference Name: 10th International Symposium on Precision Engineering Measurements and Instrumentation (ISPEMI 2018)
• Start Date: Aug 8, 2018
• End Date: Aug 10, 2018
• Acceptance Date: Aug 8, 2018
• Online Publication Date: Mar 7, 2019
• Publication Date: Mar 7, 2019
• Deposit Date: Sep 7, 2019
• Publicly Available Date: Sep 16, 2019
• Publisher: Society of Photo-optical Instrumentation Engineers
• Peer Reviewed: Peer Reviewed
• Volume: 11053
• Article Number: 1105308
• Series Title: SPIE - International Society for Optical Engineering. Proceedings
• Series ISSN: 1996-756X
• Book Title: Proceedings v. 11053, 10th International Symposium on Precision Engineering Measurements and Instrumentation
• ISBN: 9781510627819
• DOI: https://doi.org/10.1117/12.2511140
• Public URL: https://nottingham-repository.worktribe.com/output/2351245
• Publisher URL: https://www.spiedigitallibrary.org/conference-proceedings-of-spie/11053/2511140/All-optical-difference-engine-for-in-process-defect-inspection-for/10.1117/12.2511140.short
• Contract Date: Sep 11, 2019