Verification of a rigorous 2D model of rough surface scattering

Thomas, M.; Leach, R.K.; Nikolaev, N.; Widjanarko, T.; Senin, N.; Aryan, H.; Coupland, J.M.

Abstract

A rigorous two-dimensional (2D) model of electromagnetic surface scatter has been developed, based on a boundary element method (BEM) established by Simonsen [1]. Simulated far-field scatter is compared to that measured from a laser scatterometer for a sinusoidal grating, with a mean difference of 3% of the peak intensity.

Citation

Thomas, M., Leach, R., Nikolaev, N., Widjanarko, T., Senin, N., Aryan, H., & Coupland, J. (2018). Verification of a rigorous 2D model of rough surface scattering.

• Conference Name: European Optical Society Biennial Meeting (EOSAM) 2018
• End Date: Oct 12, 2018
• Acceptance Date: Jun 29, 2018
• Publication Date: Oct 12, 2018
• Deposit Date: Jul 20, 2018
• Publicly Available Date: Oct 12, 2018
• Peer Reviewed: Peer Reviewed
• Public URL: https://nottingham-repository.worktribe.com/output/950585