Comparison of two noise reduction methods in coherence scanning interferometry for surface measurement
(2019)
Conference Proceeding
Gomez, C., Su, R., Lawes, S., & Leach, R. (2019). Comparison of two noise reduction methods in coherence scanning interferometry for surface measurement
Coherence scanning interferometry (CSI) can measure relatively flat surfaces with sub-nanometre precision, but the measurement noise may increase significantly if the intensity of the interferometric signal reduces when measuring non-flat surfaces or... Read More about Comparison of two noise reduction methods in coherence scanning interferometry for surface measurement.