Comparison of Fourier optics-based methods for modeling coherence scanning interferometry
(2024)
Journal Article
Hooshmand, H., Pahl, T., de Groot, P. J., Lehmann, P., Pappas, A., Su, R., …Piano, S. (2024). Comparison of Fourier optics-based methods for modeling coherence scanning interferometry. Optical Engineering, 63(4), Article 044102. https://doi.org/10.1117/1.OE.63.4.044102
Coherence scanning interferometry (CSI) is a widely used optical method for surface topography measurement of industrial and biomedical surfaces. The operation of CSI can be modeled using approximate physics-based approaches with minimal computationa... Read More about Comparison of Fourier optics-based methods for modeling coherence scanning interferometry.