Comparison of approximate methods for modelling coherence scanning interferometry

Hooshmand, Helia; Pahl, Tobias; de Groot, Peter J.; Lehmann, Peter; Pappas, Athanasios; Su, Rong; Leach, Richard; Piano, Samanta

Abstract

Coherence scanning interferometry (CSI) is a widely used optical method for surface topography measurement of industrial and biomedical surfaces. The operation of CSI can be modelled using approximate physics-based approaches with minimal computational effort. A critical aspect of CSI modelling is defining the transfer function for the imaging properties of the instrument in order to predict the interference fringes from which topography information is extracted. Approximate methods, for example, elementary Fourier optics, universal Fourier optics and foil models, use scalar diffraction theory and the imaging properties of the optical system to model CSI surface topography measurement. In this paper, the measured topographies of different surfaces, including various sinusoids, two posts and a step height, calculated using the three example methods are compared. The presented results illustrate the agreement between the three example models.

Citation

Hooshmand, H., Pahl, T., de Groot, P. J., Lehmann, P., Pappas, A., Su, R., Leach, R., & Piano, S. (2023, June). Comparison of approximate methods for modelling coherence scanning interferometry. Presented at Modeling Aspects in Optical Metrology IX, Munich, Germany

• Presentation Conference Type: Edited Proceedings
• Conference Name: Modeling Aspects in Optical Metrology IX
• Start Date: Jun 26, 2023
• End Date: Jun 28, 2023
• Acceptance Date: Aug 10, 2023
• Online Publication Date: Aug 10, 2023
• Publication Date: Aug 10, 2023
• Deposit Date: Aug 14, 2023
• Publisher: Society of Photo-optical Instrumentation Engineers
• Peer Reviewed: Peer Reviewed
• Volume: 12619
• Article Number: 126190R
• Series Title: SPIE - International Society for Optical Engineering. Proceedings
• Series ISSN: 1996-756X
• Book Title: Modeling Aspects in Optical Metrology IX
• ISBN: 9781510664470
• DOI: https://doi.org/10.1117/12.2673657
• Keywords: 3D modeling; Equipment; Modeling; Optical surfaces; Instrument modeling; Light sources and illumination; Fourier transforms; Imaging systems; Interferometry
• Public URL: https://nottingham-repository.worktribe.com/output/24344497
• Publisher URL: https://www.spiedigitallibrary.org/conference-proceedings-of-spie/12619/2673657/Comparison-of-approximate-methods-for-modelling-coherence-scanning-interferometry/10.1117/12.2673657.short?SSO=1