Framework for uncertainty evaluation in optical surface topography measurement using a virtual instrument
(2025)
Journal Article
Hooshmand, H., Pappas, A., Isa, M., Su, R., Haitjema, H., Piano, S., & Leach, R. (2025). Framework for uncertainty evaluation in optical surface topography measurement using a virtual instrument. Measurement, 253(Part D), Article 117604. https://doi.org/10.1016/j.measurement.2025.117604
Uncertainty evaluation in the measurement of surfaces with complex topography using optical techniques remains a challenge due to the complex interaction between light and the surfaces. The ISO 25178 part 600 specification standard simplifies uncerta... Read More about Framework for uncertainty evaluation in optical surface topography measurement using a virtual instrument.