All Outputs (2)

Extracting focus variation data from coherence scanning interferometric measurements (2024)
Journal Article
Liu, J., Hooshmand, H., Piano, S., Leach, R., Coupland, J., Ren, M., …Su, R. (2024). Extracting focus variation data from coherence scanning interferometric measurements. Precision Engineering, 88, 699-706. https://doi.org/10.1016/j.precisioneng.2024.04.016

Coherence scanning interferometry (CSI), based on the principle of interference, can achieve sub-nanometer precision for height measurements. On the other hand, focus variation microscopy (FVM), combining the small depth of field of the objective, is... Read More about Extracting focus variation data from coherence scanning interferometric measurements.

Comparison of Fourier optics-based methods for modeling coherence scanning interferometry (2024)
Journal Article
Hooshmand, H., Pahl, T., de Groot, P. J., Lehmann, P., Pappas, A., Su, R., …Piano, S. (2024). Comparison of Fourier optics-based methods for modeling coherence scanning interferometry. Optical Engineering, 63(4), Article 044102. https://doi.org/10.1117/1.OE.63.4.044102

Coherence scanning interferometry (CSI) is a widely used optical method for surface topography measurement of industrial and biomedical surfaces. The operation of CSI can be modeled using approximate physics-based approaches with minimal computationa... Read More about Comparison of Fourier optics-based methods for modeling coherence scanning interferometry.