On tilt and curvature dependent errors and the calibration of coherence scanning interferometry
(2017)
Journal Article
Although coherence scanning interferometry (CSI) is capable of measuring surface topography with sub-nanometre precision, it is well known that the performance of measuring instruments depends strongly on the local tilt and curvature of the sample su... Read More about On tilt and curvature dependent errors and the calibration of coherence scanning interferometry.