Model-based defect detection on structured surfaces having optically unresolved features

O�Connor, Daniel; Henning, Andrew J.; Sherlock, Ben; Leach, Richard; Coupland, Jeremy; Giusca, Claudiu L.

Abstract

In this paper, we demonstrate, both numerically and experimentally, a method for the detection of defects on structured surfaces having optically unresolved features. The method makes use of synthetic reference data generated by an observational model that is able to simulate the response of the selected optical inspection system to the ideal structure, thereby providing an ideal measure of deviation from nominal geometry. The method addresses the high dynamic range challenge faced in highly parallel manufacturing by enabling the use of low resolution, wide field of view optical systems for defect detection on surfaces containing small features over large regions.

• Journal Article Type: Article
• Acceptance Date: Sep 21, 2015
• Publication Date: Oct 13, 2015
• Deposit Date: Sep 20, 2018
• Print ISSN: 1464-4258
• Publisher: IOP Publishing
• Peer Reviewed: Peer Reviewed
• Volume: 54
• Issue: 30
• Pages: 8872-8877
• DOI: https://doi.org/10.1364/AO.54.008872
• Public URL: https://nottingham-repository.worktribe.com/output/1105884
• Publisher URL: https://www.osapublishing.org/ao/abstract.cfm?uri=ao-54-30-8872
• Additional Information: eStaffProfile Description: , eStaffProfile Brief Description of Type: