Synergistic integrated design of an electrochemical mechanical polishing end-effector for robotic polishing applications
(2018)
Journal Article
In this paper, we present a novel design of a robotic electrochemical mechanical polishing (ECMP) process. Firstly, the process is presented to replace the conventional ECMP process by a robotic-based one. The advantage of using industrial robots lie... Read More about Synergistic integrated design of an electrochemical mechanical polishing end-effector for robotic polishing applications.