Synergistic integrated design of an electrochemical mechanical polishing end-effector for robotic polishing applications

Mohammad, Abd El Khalick; Hong, Jie; Wang, Danwei; Guan, Yisheng

Abstract

In this paper, we present a novel design of a robotic electrochemical mechanical polishing (ECMP) process. Firstly, the process is presented to replace the conventional ECMP process by a robotic-based one. The advantage of using industrial robots lies in their flexibility, reconfigurability, large workspace and low prices compared to the conventional systems. Secondly, a novel design of a force-controlled end-effector for this purpose is presented. The end-effector is integrated into a macro-mini robot polishing cell. The macro robot (an industrial robotic manipulator) is used to position the mini robot (the proposed end-effector) according to the workpiece profile while the mini robot controls the polishing force. The effectiveness of the proposed device to polish un-milled and milled surfaces has been examined through polishing experiments. The results demonstrate the effectiveness of the presented device to reduce the surface roughness and improve the reflectability and appearance.

Citation

Mohammad, A. E. K., Hong, J., Wang, D., & Guan, Y. (2019). Synergistic integrated design of an electrochemical mechanical polishing end-effector for robotic polishing applications. Robotics and Computer-Integrated Manufacturing, 55(Part A), 65-75. https://doi.org/10.1016/j.rcim.2018.07.005

• Journal Article Type: Article
• Acceptance Date: Jul 12, 2018
• Online Publication Date: Aug 1, 2018
• Publication Date: 2019-02
• Deposit Date: May 19, 2020
• Journal: Robotics and Computer-Integrated Manufacturing
• Print ISSN: 0736-5845
• Electronic ISSN: 1879-2537
• Publisher: Elsevier
• Peer Reviewed: Peer Reviewed
• Volume: 55
• Issue: Part A
• Pages: 65-75
• DOI: https://doi.org/10.1016/j.rcim.2018.07.005
• Public URL: https://nottingham-repository.worktribe.com/output/4391958
• Publisher URL: https://www.sciencedirect.com/science/article/abs/pii/S0736584517303058?via%3Dihub