Scattering and three-dimensional imaging in surface topography measuring interference microscopy

Su, Rong; Coupland, Jeremy; Sheppard, Colin; Leach, Richard

doi:10.1364/josaa.411929

Scattering and three-dimensional imaging in surface topography measuring interference microscopy

Su, Rong; Coupland, Jeremy; Sheppard, Colin; Leach, Richard

Authors

Rong Su

Jeremy Coupland

Colin Sheppard

Professor RICHARD LEACH RICHARD.LEACH@NOTTINGHAM.AC.UK
CHAIR IN METROLOGY

Citation

Su, R., Coupland, J., Sheppard, C., & Leach, R. (2021). Scattering and three-dimensional imaging in surface topography measuring interference microscopy. Journal of the Optical Society of America A, 38(2), A27-A42. https://doi.org/10.1364/josaa.411929

Journal Article Type	Article
Acceptance Date	Jan 12, 2021
Online Publication Date	Feb 1, 2021
Publication Date	Feb 1, 2021
Deposit Date	Feb 3, 2021
Publicly Available Date	Feb 3, 2021
Journal	Journal of the Optical Society of America A
Print ISSN	1084-7529
Electronic ISSN	1520-8532
Publisher	Optical Society of America
Peer Reviewed	Peer Reviewed
Volume	38
Issue	2
Pages	A27-A42
DOI	https://doi.org/10.1364/josaa.411929
Keywords	Atomic and Molecular Physics, and Optics; Electronic, Optical and Magnetic Materials; Computer Vision and Pattern Recognition
Public URL	https://nottingham-repository.worktribe.com/output/5290724
Publisher URL	https://www.osapublishing.org/josaa/fulltext.cfm?uri=josaa-38-2-A27&id=447040