Numerical modelling of MPA-CVD reactors with the discontinuous Galerkin finite element method
(2017)
Journal Article
Houston, P., & Sime, N. (2017). Numerical modelling of MPA-CVD reactors with the discontinuous Galerkin finite element method. Journal of Physics D: Applied Physics, 50(29), Article 295202. https://doi.org/10.1088/1361-6463/aa77dc
In this article we develop a fully self consistent mathematical model describing the formation of a hydrogen plasma in a microwave power assisted chemical vapour deposition (MPA-CVD) reactor employed for the manufacture of synthetic diamond. The unde... Read More about Numerical modelling of MPA-CVD reactors with the discontinuous Galerkin finite element method.