Comparison of coherence scanning interferometry, focus variation and confocal microscopy for surface topography measurement
(2023)
Conference Proceeding
Hooshmand, H., Liu, M., Pappas, A., Thompson, A., Leach, R., & Piano, S. (2023). Comparison of coherence scanning interferometry, focus variation and confocal microscopy for surface topography measurement.
The most common optical technologies for surface topography measurement are coherence scanning interferometry (CSI), focus variation microscopy (FV) and imaging confocal microscopy (CM). Due to the benefits and drawbacks of each, these instruments ar... Read More about Comparison of coherence scanning interferometry, focus variation and confocal microscopy for surface topography measurement.