A flexible and programmable software framework has been developed that enables the creation of simulated, areal surface topography datasets. The framework allows the creation of surfaces through a layered approach where deterministic topographic structures can be combined with pseudo-random periodic and non-periodic components. The software can be used to generate reference topographies useful for the testing and validation of surface metrology methods and algorithms. The software framework is implemented in Matlab, and features a graphical user interface that enables easy navigation, and allows users to control the topography creation process. In addition to providing a complete analytical description for some classes of generated surfaces, the framework allows the surface datasets to be exported in the Surface Data File format, thus enabling easy transfer to a wide array of commercial surface metrology software applications.
Todhunter, L. D., Senin, N., Leach, R., Lawes, S., Blateyron, F., & Harris, P. (2018). A programmable software framework for the generation of simulated surface topography