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Lateral error compensation for focus variation microscopy

Pérez, Pablo; Syam, Wahyudin P.; Albajez, José Antonio; Santolaria, Jorge; Leach, Richard

Authors

Pablo Pérez

Wahyudin P. Syam

José Antonio Albajez

Jorge Santolaria



Abstract

Focus variation microscopy measures both the areal form and areal surface texture of components. Improvements to the accuracy and precision of focus variation microscopes usually requires measurements with multiple image-fields to compensate lateral stage errors. This paper proposes a methodology for compensation of lateral stage error of a focus variation microscope using an uncalibrated artefact.

Citation

PĂ©rez, P., Syam, W. P., Albajez, J. A., Santolaria, J., & Leach, R. (2018). Lateral error compensation for focus variation microscopy

Conference Name 18th EUSPEN International Conference & Exhibition
Acceptance Date Mar 7, 2018
Publication Date Jun 4, 2018
Deposit Date Mar 23, 2018
Publicly Available Date Jun 4, 2018
Peer Reviewed Peer Reviewed
Public URL http://eprints.nottingham.ac.uk/id/eprint/50625
Copyright Statement Copyright information regarding this work can be found at the following address: http://eprints.nottingham.ac.uk/end_user_agreement.pdf

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EUSPEN - Lateral error compensation for focus variation microscopy.pdf (665 Kb)
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Copyright Statement
Copyright information regarding this work can be found at the following address: http://eprints.nottingham.ac.uk/end_user_agreement.pdf





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