Lateral error compensation for focus variation microscopy

P�rez, Pablo; Syam, Wahyudin P.; Albajez, Jos� Antonio; Santolaria, Jorge; Leach, Richard

Abstract

Focus variation microscopy measures both the areal form and areal surface texture of components. Improvements to the accuracy and precision of focus variation microscopes usually requires measurements with multiple image-fields to compensate lateral stage errors. This paper proposes a methodology for compensation of lateral stage error of a focus variation microscope using an uncalibrated artefact.

Citation

Pérez, P., Syam, W. P., Albajez, J. A., Santolaria, J., & Leach, R. (2018). Lateral error compensation for focus variation microscopy.

• Conference Name: 18th EUSPEN International Conference & Exhibition
• Acceptance Date: Mar 7, 2018
• Publication Date: Jun 4, 2018
• Deposit Date: Mar 23, 2018
• Publicly Available Date: Jun 4, 2018
• Peer Reviewed: Peer Reviewed
• Public URL: https://nottingham-repository.worktribe.com/output/936578