Noise evaluation of a point autofocus surface topography measuring instrument

Maculotti, Giacomo; Feng, Xiaobing; Galetto, Maurizio; Leach, Richard K.

Abstract

In this work, the measurement noise of a point autofocus surface topography measuring instrument is evaluated, as the first step towards establishing a route to traceability for this type of instrument. The evaluation is based on the determination of the metrological characteristics for noise as outlined in draft ISO specification standards by using a calibrated optical flat. The static noise and repeatability of the autofocus sensor are evaluated. The influence of environmental disturbances on the measured surface topography and the built-in software to compensate for such influences are also investigated. The instrument was found to have a measurement noise of approximately 2 nm or, when expressed with the measurement bandwidth, 0.4 nm/√Hz for a single-point measurement.

Citation

Maculotti, G., Feng, X., Galetto, M., & Leach, R. K. (2018). Noise evaluation of a point autofocus surface topography measuring instrument. Measurement Science and Technology, 29(6), https://doi.org/10.1088/1361-6501/aab528

• Journal Article Type: Article
• Acceptance Date: Mar 8, 2018
• Online Publication Date: Mar 8, 2018
• Publication Date: Apr 26, 2018
• Deposit Date: Mar 12, 2018
• Publicly Available Date: Mar 9, 2019
• Journal: Measurement Science and Technology
• Print ISSN: 0957-0233
• Electronic ISSN: 1361-6501
• Publisher: IOP Publishing
• Peer Reviewed: Peer Reviewed
• Volume: 29
• Issue: 6
• DOI: https://doi.org/10.1088/1361-6501/aab528
• Public URL: https://nottingham-repository.worktribe.com/output/928731
• Publisher URL: http://iopscience.iop.org/article/10.1088/1361-6501/aab528/meta
• Additional Information: This is an author-created, un-copyedited version of an article accepted for publication/published in Measurement Science and Technology. IOP Publishing Ltd is not responsible for any errors or omissions in this version of the manuscript or any version derived from it. The Version of Record is available online at http://iopscience.iop.org/article/10.1088/1361-6501/aab528/meta