Measurement noise of a coherence scanning interferometer in an industrial environment

Barker, Alexander; Syam, Wahyudin P.; Leach, Richard K.

Alexander Barker

Wahyudin P. Syam

RICHARD LEACH RICHARD.LEACH@NOTTINGHAM.AC.UK
Chair in Metrology

Barker, A., Syam, W. P., & Leach, R. K. (2016). Measurement noise of a coherence scanning interferometer in an industrial environment.

Conference Name	31st ASPE Annual Meeting
End Date	Oct 28, 2016
Acceptance Date	Oct 23, 2016
Publication Date	Oct 29, 2016
Deposit Date	Nov 2, 2016
Publicly Available Date	Nov 2, 2016
Peer Reviewed	Peer Reviewed
Public URL	https://nottingham-repository.worktribe.com/output/820995
Related Public URLs	http://aspe.net/technical-meetings/31st-annual-meeting/ http://aspe.net/technical-publications/proceedings/aspe-annual-meetings/
Additional Information	Measurement noise of a coherence scanning interferometer in an industrial environment. Alexander Barker, Wahyudin P. syam, Richard K. Leach. Proceedings of the Thirty-First Annual Meeting of the American Society for Precision Engineering, 23-28 October 2016. Vol. 65, p. 594-599.