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An integrated measurement method for complex micro-scale geometries

Rabani, Amir; Senin, Nicola; Helmli, Franz; Butler-Smith, Paul; Leach, Richard K.

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Amir Rabani

Nicola Senin

Franz Helmli

Paul Butler-Smith

Richard K. Leach


Micro-scale geometries are becoming commonplace in many high-precision manufacturing applications. Micro-drilling processes, for example, are being employed for producing holes in demanding applications involving fluid transfer, atomisers and micro-mechanics. This paper explores the measurement and characterisation of a high aspect-ratio micro-hole (nominal diameter approximately 1000 pm, aspect-ratio 1:10), produced using abrasive waterjet in Ti6AI4V. X-ray computed tomography, contact micro-coordinate metrology and focus-variation microscopy are used for measuring the hole surfaces, and dedicated computational geometry algorithms are applied to obtain critical hole dimensions, such as radius as a function of depth. The comparison of the measurement and characterisation results obtained by means of the different solutions explored hints at new approaches for multisensor data fusion that can help reduce bias in the measurement of high aspect-ratio micro-scale features.

Conference Name euspen 16th International Conference & Exhibition
End Date Jun 3, 2016
Publication Date May 30, 2016
Deposit Date Jul 22, 2016
Publicly Available Date Jul 22, 2016
Peer Reviewed Peer Reviewed
Keywords High aspect-ratio micro-scale holes; Coordinate metrology; Multi-sensor data fusion
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