High-accuracy surface measurement through modelling of the surface transfer function in interference microscopy

Su, Rong; Thomas, Matthew; Liu, Mingyu; Coupland, Jeremy; Leach, Richard

Abstract

Surfaces featuring complex topographies, such as high slope angles, large curvatures and high aspect-ratio structures on both macro- and micro-scales, present significant challenges to optical measuring instruments. Here we demonstrate a method to characterise and correct the three-dimensional surface transfer function (3D STF) of a coherence scanning interferometer (CSI). Slope-dependent errors present in the original measurements are reduced after phase inversion of the 3D STF, and the final results agree with traceable contact stylus measurements within the 30 nm reproducibility of the stylus measurements. This method enables in-situ compensation for errors related to aberrations, defocus and diffraction.

Citation

Su, R., Thomas, M., Liu, M., Coupland, J., & Leach, R. (2019, August). High-accuracy surface measurement through modelling of the surface transfer function in interference microscopy. Presented at Applied Optical Metrology III, San Diego, United States

• Presentation Conference Type: Edited Proceedings
• Conference Name: Applied Optical Metrology III
• Start Date: Aug 13, 2019
• End Date: Aug 15, 2019
• Acceptance Date: Aug 11, 2019
• Publication Date: Sep 3, 2019
• Deposit Date: Sep 7, 2019
• Publicly Available Date: Sep 9, 2019
• Publisher: Society of Photo-optical Instrumentation Engineers
• Peer Reviewed: Peer Reviewed
• Volume: 11102
• Article Number: 1110205
• Series Title: SPIE - International Society for Optical Engineering. Proceedings
• Series ISSN: 1996-756X
• Book Title: Applied Optical Metrology III
• ISBN: 9781510628977
• DOI: https://doi.org/10.1117/12.2528911
• Public URL: https://nottingham-repository.worktribe.com/output/2585517
• Publisher URL: https://www.spiedigitallibrary.org/conference-proceedings-of-spie/11102/2528911/High-accuracy-surface-measurement-through-modelling-of-the-surface-transfer/10.1117/12.2528911.short
• Contract Date: Sep 9, 2019