Comparison of approximate methods for modelling coherence scanning interferometry
(2023)
Presentation / Conference Contribution
Hooshmand, H., Pahl, T., de Groot, P. J., Lehmann, P., Pappas, A., Su, R., …Piano, S. (2023). Comparison of approximate methods for modelling coherence scanning interferometry. Proceedings of SPIE, 12619, https://doi.org/10.1117/12.2673657
Coherence scanning interferometry (CSI) is a widely used optical method for surface topography measurement of industrial and biomedical surfaces. The operation of CSI can be modelled using approximate physics-based approaches with minimal computation... Read More about Comparison of approximate methods for modelling coherence scanning interferometry.