Comparison of coherence scanning interferometry, focus variation and confocal microscopy for surface topography measurement
Presentation / Conference Contribution
Hooshmand, H., Liu, M., Pappas, A., Thompson, A., Leach, R., & Piano, S. (2023, June). Comparison of coherence scanning interferometry, focus variation and confocal microscopy for surface topography measurement. Presented at Euspen’s 23rd International Conference & Exhibition, Copenhagen, Denmark
The most common optical technologies for surface topography measurement are coherence scanning interferometry (CSI), focus variation microscopy (FV) and imaging confocal microscopy (CM). Due to the benefits and drawbacks of each, these instruments ar... Read More about Comparison of coherence scanning interferometry, focus variation and confocal microscopy for surface topography measurement.