Comparison of rigorous scattering models to accurately replicate the behaviour of scattered electromagnetic waves in optical surface metrology
(2024)
Journal Article
Hooshmand, H., Pahl, T., Hansen, P.-E., Fu, L., Birk, A., Karamehmedović, M., Lehmann, P., Reichelt, S., Leach, R., & Piano, S. (2025). Comparison of rigorous scattering models to accurately replicate the behaviour of scattered electromagnetic waves in optical surface metrology. Journal of Computational Physics, 521, Article 113519. https://doi.org/10.1016/j.jcp.2024.113519
Rigorous scattering models are based on Maxwell's equations and can provide high-accuracy solutions to model electromagnetic wave scattering from objects. Being able to calculate the scattered field from any surface geometry and considering the effec... Read More about Comparison of rigorous scattering models to accurately replicate the behaviour of scattered electromagnetic waves in optical surface metrology.