Lateral scale calibration for focus variation microscopy

Alburayt, Anas; Syam, Wahyudin P.; Leach, Richard

Abstract

Areal surface texture measuring instruments can be calibrated by determining a set of metrological characteristics currently in the final stages of standardisation. In this paper, amplification, linearity and perpendicularity characteristics have been determined to calibrate the lateral performance of a focus variation microscope. The paper presents a novel and low-cost material measure and procedures that are used to determine the characteristics. The material measure is made of stainless steel with a cross-grating grid of hemispherical grooves. The design, manufacturing and calibration of the material measure are discussed. The (20 × 20) mm grid is measured with and without image stitching. The results show that the proposed material measure and procedures can be used to determine the error of the amplification, linearity and perpendicularity characteristics. In addition, the lateral stage error can be significantly reduced by measurement with image stitching.

Citation

Alburayt, A., Syam, W. P., & Leach, R. (in press). Lateral scale calibration for focus variation microscopy. Measurement Science and Technology, 29(6), https://doi.org/10.1088/1361-6501/aab949

• Journal Article Type: Article
• Acceptance Date: Mar 22, 2018
• Online Publication Date: Mar 23, 2018
• Deposit Date: Mar 23, 2018
• Publicly Available Date: Mar 23, 2018
• Journal: Measurement Science and Technology
• Print ISSN: 0957-0233
• Electronic ISSN: 1361-6501
• Publisher: IOP Publishing
• Peer Reviewed: Peer Reviewed
• Volume: 29
• Issue: 6
• DOI: https://doi.org/10.1088/1361-6501/aab949
• Public URL: https://nottingham-repository.worktribe.com/output/921358
• Publisher URL: http://iopscience.iop.org/article/10.1088/1361-6501/aab949/meta
• Contract Date: Mar 23, 2018