Performance verification of a 4-axis focus variation coordinate measuring system

Moroni, Giovanni; Syam, Wahyudin P.; Petr�, Stefano

Abstract

Performance verification of a coordinate measuring system (CMS) is important for instrument acceptance, reverification, comparability as well as measurement traceability to the definition of the meter. State-of-the-art ISO 10360 standard series is the reference text about the procedure of verification for CMS. Specifically, ISO 10360-8 considers optical distance sensor based CMSs. This article proposes procedures and artifacts for performance verification of focus variation-based CMS for a simultaneous 4-axis measuring mode. The proposal is inspired by, but goes beyond, the ISO 10360 standard, proposing an original solution for simultaneous linear and rotational axes verification.

Citation

Moroni, G., Syam, W. P., & Petrò, S. (in press). Performance verification of a 4-axis focus variation coordinate measuring system. IEEE Transactions on Instrumentation and Measurement, https://doi.org/10.1109/TIM.2016.2614753

• Journal Article Type: Article
• Acceptance Date: Sep 22, 2016
• Online Publication Date: Oct 20, 2016
• Deposit Date: Nov 11, 2016
• Publicly Available Date: Nov 11, 2016
• Journal: IEEE Transactions on Instrumentation and Measurement
• Print ISSN: 0018-9456
• Electronic ISSN: 0018-9456
• Publisher: Institute of Electrical and Electronics Engineers
• Peer Reviewed: Peer Reviewed
• DOI: https://doi.org/10.1109/TIM.2016.2614753
• Keywords: Performance Evaluation, ISO 10360 standards,; Coordinate Measuring Systems, Focus Variation Microscopy
• Public URL: https://nottingham-repository.worktribe.com/output/822438
• Publisher URL: http://ieeexplore.ieee.org/abstract/document/7593291/
• Additional Information: c2016 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other users, including reprinting/ republishing this material for advertising or promotional purposes, creating new collective works for resale or redistribution to servers or lists, or reuse of any copyrighted components of this work in other works.