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Performance verification of a 4-axis focus variation coordinate measuring system

Moroni, Giovanni; Syam, Wahyudin P.; Petr�, Stefano

Performance verification of a 4-axis focus variation coordinate measuring system Thumbnail


Giovanni Moroni

Wahyudin P. Syam

Stefano Petr�


Performance verification of a coordinate measuring system (CMS) is important for instrument acceptance, reverification, comparability as well as measurement traceability to the definition of the meter. State-of-the-art ISO 10360 standard series is the reference text about the procedure of verification for CMS. Specifically, ISO 10360-8 considers optical distance sensor based CMSs. This article proposes procedures and artifacts for performance verification of focus variation-based CMS for a simultaneous 4-axis measuring mode. The proposal is inspired by, but goes beyond, the ISO 10360 standard, proposing an original solution for simultaneous linear and rotational axes verification.

Journal Article Type Article
Acceptance Date Sep 22, 2016
Online Publication Date Oct 20, 2016
Deposit Date Nov 11, 2016
Publicly Available Date Nov 11, 2016
Journal IEEE Transactions on Instrumentation and Measurement
Print ISSN 0018-9456
Electronic ISSN 0018-9456
Publisher Institute of Electrical and Electronics Engineers
Peer Reviewed Peer Reviewed
Keywords Performance Evaluation, ISO 10360 standards,
Coordinate Measuring Systems, Focus Variation Microscopy
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