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Phase and fringe order determination in wavelength scanning interferometry

Moschetti, Guiseppe; Forbes, Alistair; Leach, Richard K.; Jiang, Xiang; O'Connor, Daniel

Authors

Guiseppe Moschetti Giuseppe.moschetti@npl.co.uk

Alistair Forbes

Xiang Jiang

Daniel O'Connor



Abstract

A method to obtain unambiguous surface height measurements using wavelength scanning interferometry with an improved repeatability, comparable to that obtainable using phase shifting interferometry, is reported. Rather than determining the conventional fringe frequency-derived z height directly, the method uses the frequency to resolve the fringe order ambiguity, and combine this information with the more accurate and repeatable fringe phase derived z height. A theoretical model to evaluate the method’s performance in the presence of additive noise is derived and shown to be in good agreement with experiments. The measurement repeatability is improved by a factor of ten over that achieved when using frequency information alone, reaching the sub-nanometre range. Moreover, the z-axis non-linearity (bleed-through or ripple error) is reduced by a factor of ten. These order of magnitude improvements in measurement performance are demonstrated through a number of practical measurement examples.

Journal Article Type Article
Publication Date Apr 16, 2016
Journal Optics Express
Electronic ISSN 1094-4087
Publisher Optical Society of America
Peer Reviewed Peer Reviewed
Volume 24
Issue 8
Pages 8997-9012
APA6 Citation Moschetti, G., Forbes, A., Leach, R. K., Jiang, X., & O'Connor, D. (2016). Phase and fringe order determination in wavelength scanning interferometry. Optics Express, 24(8), 8997-9012. https://doi.org/10.1364/OE.24.008997
DOI https://doi.org/10.1364/OE.24.008997
Publisher URL https://www.osapublishing.org/oe/abstract.cfm?uri=oe-24-8-8997
Copyright Statement Copyright information regarding this work can be found at the following address: http://creativecommons.org/licenses/by/4.0
Additional Information © 2016 Optical Society of America. One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modifications of the content of this paper are prohibited.

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Copyright Statement
Copyright information regarding this work can be found at the following address: http://creativecommons.org/licenses/by/4.0





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