Teguh Santoso
On-machine focus variation measurement for micro-scale hybrid surface texture machining
Santoso, Teguh; Syam, Wahyudin P.; Darukumalli, Subbareddy; Cai, Yukui; Helmli, Franz; Luo, Xichun; Leach, Richard
Authors
Wahyudin P. Syam
Subbareddy Darukumalli
Yukui Cai
Franz Helmli
Xichun Luo
RICHARD LEACH RICHARD.LEACH@NOTTINGHAM.AC.UK
Chair in Metrology
Abstract
Fast and accurate in-line areal surface topography measuring instruments are required to control the quality of microscale manufactured components, without significantly slowing down the production process. Full-field areal optical surface topography measurement instruments are promising for in-line or on-machine measurement applications due to their ability to measure quickly, to access small features and to avoid surface damage. This paper presents the development and integration of a compact optical focus variation sensor for on-machine surface topography measurement mounted on to a hybrid ultraprecision machine tool. The sensor development is described and a case study involving the on-machine dimensional measurement of the depth of hydrophobic microscale features, including microchannels and micro-dimples, is presented. Comparisons of results between the on-machine measurements obtained by the developed sensor and a desktop focus variation microscope are presented and discussed. The comparison results show that the developed focus variation sensor is able to perform on-machine dimensional measurement of microscale features within sub-micrometre accuracy.
Citation
Santoso, T., Syam, W. P., Darukumalli, S., Cai, Y., Helmli, F., Luo, X., & Leach, R. (2020). On-machine focus variation measurement for micro-scale hybrid surface texture machining. International Journal of Advanced Manufacturing Technology, 109(9-12), 2353–2364. https://doi.org/10.1007/s00170-020-05767-z
Journal Article Type | Article |
---|---|
Acceptance Date | Jul 10, 2020 |
Online Publication Date | Jul 30, 2020 |
Publication Date | Aug 1, 2020 |
Deposit Date | Jul 16, 2020 |
Publicly Available Date | Jul 30, 2020 |
Journal | The International Journal of Advanced Manufacturing Technology |
Electronic ISSN | 0268-3768 |
Publisher | Springer Verlag |
Peer Reviewed | Peer Reviewed |
Volume | 109 |
Issue | 9-12 |
Pages | 2353–2364 |
DOI | https://doi.org/10.1007/s00170-020-05767-z |
Keywords | Control and Systems Engineering; Mechanical Engineering; Industrial and Manufacturing Engineering; Software; Computer Science Applications |
Public URL | https://nottingham-repository.worktribe.com/output/4770278 |
Publisher URL | https://link.springer.com/article/10.1007/s00170-020-05767-z |
Additional Information | Received: 16 March 2020; Accepted: 13 July 2020; First Online: 30 July 2020 |
Files
Santoso Etal 2020 On-machine FVM Machining
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Publisher Licence URL
https://creativecommons.org/licenses/by/4.0/
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