Zimeng Zhang
Phase Transformation Driven by Oxygen Vacancy Redistribution as the Mechanism of Ferroelectric Hf0.5Zr0.5O2 Fatigue
Zhang, Zimeng; Craig, Isaac; Zhou, Tao; Holt, Martin; Flores, Raul; Sheridan, Evan; Inzani, Katherine; Huang, Xiaoxi; Nag, Joyeeta; Prasad, Bhagwati; Griffin, Sinéad M.; Ramesh, Ramamoorthy
Authors
Isaac Craig
Tao Zhou
Martin Holt
Raul Flores
Evan Sheridan
KATHERINE INZANI KATHERINE.INZANI1@NOTTINGHAM.AC.UK
Associate Professor
Xiaoxi Huang
Joyeeta Nag
Bhagwati Prasad
Sinéad M. Griffin
Ramamoorthy Ramesh
Abstract
As a promising candidate for nonvolatile memory devices, the hafnia-based ferroelectric system has recently been a hot research topic. Although significant progress has been made over the past decade, the endurance problem is still an obstacle to its final application. In perovskite-based ferroelectrics, such as the well-studied Pb[ZrxTi1−x]O3 (PZT) family, polarization fatigue has been discussed within the framework of the interaction of charged defects (such as oxygen vacancies) with the moving domains during the switching process, particularly at the electrode-ferroelectric interface. Armed with this background, a hypothesis is set out to test that a similar mechanism can be in play with the hafnia-based ferroelectrics. The conducting perovskite La-Sr-Mn-O is used as the contact electrode to create La0.67Sr0.33MnO3/Hf0.5Zr0.5O2(HZO)/La0.67Sr0.33MnO3 capacitor structures deposited on SrTiO3-Si substrates. Nanoscale X-ray diffraction is performed on single capacitors, and a structural phase transition from polar o-phase toward non-polar m-phase is demonstrated during the bipolar switching process. The energy landscape of multiphase HZO has been calculated at varying oxygen vacancy concentrations. Based on both theoretical and experimental results, it is found that a polar to non-polar phase transformation caused by oxygen vacancy redistribution during electric cycling is a likely explanation for fatigue in HZO.
Citation
Zhang, Z., Craig, I., Zhou, T., Holt, M., Flores, R., Sheridan, E., Inzani, K., Huang, X., Nag, J., Prasad, B., Griffin, S. M., & Ramesh, R. (2024). Phase Transformation Driven by Oxygen Vacancy Redistribution as the Mechanism of Ferroelectric Hf0.5Zr0.5O2 Fatigue. Advanced Electronic Materials, Article 2300877. https://doi.org/10.1002/aelm.202300877
Journal Article Type | Article |
---|---|
Acceptance Date | Jun 28, 2024 |
Online Publication Date | Jun 28, 2024 |
Publication Date | Jun 28, 2024 |
Deposit Date | Jul 23, 2024 |
Publicly Available Date | Jul 23, 2024 |
Journal | Advanced Electronic Materials |
Electronic ISSN | 2199-160X |
Publisher | Wiley |
Peer Reviewed | Peer Reviewed |
Article Number | 2300877 |
DOI | https://doi.org/10.1002/aelm.202300877 |
Public URL | https://nottingham-repository.worktribe.com/output/37300281 |
Publisher URL | https://onlinelibrary.wiley.com/doi/10.1002/aelm.202300877 |
Additional Information | Received: 2023-12-15; Published: 2024-06-28 |
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Phase Transformation Driven by Oxygen VacancyRedistribution as the Mechanism of FerroelectricHf 0.5 Zr0.5 O2 Fatigue
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Publisher Licence URL
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