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Chemical Imaging of Buried Interfaces in Organic-Inorganic Devices Using Focused Ion Beam-Time-of-Flight-Secondary-Ion Mass Spectrometry

Tiddia, Mariavitalia; Mihara, Ichiro; Seah, Martin P.; Trindade, Gustavo Ferraz; Kollmer, Felix; Roberts, Clive J.; Hague, Richard; Mula, Guido; Gilmore, Ian S.; Havelund, Rasmus


Mariavitalia Tiddia

Ichiro Mihara

Martin P. Seah

Gustavo Ferraz Trindade

Felix Kollmer

Professor of Additive Manufacturing

Guido Mula

Ian S. Gilmore

Rasmus Havelund


Copyright © 2019 American Chemical Society. Organic-inorganic hybrid materials enable the design and fabrication of new materials with enhanced properties. The interface between the organic and inorganic materials is often critical to the device's performance; therefore, chemical characterization is of significant interest. Because the interfaces are often buried, milling by focused ion beams (FIBs) to expose the interface is becoming increasingly popular. Chemical imaging can subsequently be obtained using secondary-ion mass spectrometry (SIMS). However, the FIB milling process damages the organic material. In this study, we make an organic-inorganic test structure to develop a detailed understanding of the processes involved in FIB milling and SIMS imaging. We provide an analysis methodology that involves a "clean-up" process using sputtering with an argon gas cluster ion source to remove the FIB-induced damage. The methodology is evaluated for two additive manufactured devices, an encapsulated strain sensor containing silver tracks embedded in a polymeric material and a copper track on a flexible polymeric substrate created using a novel nanoparticle sintering technique.


Tiddia, M., Mihara, I., Seah, M. P., Trindade, G. F., Kollmer, F., Roberts, C. J., …Havelund, R. (2019). Chemical Imaging of Buried Interfaces in Organic-Inorganic Devices Using Focused Ion Beam-Time-of-Flight-Secondary-Ion Mass Spectrometry. ACS Applied Materials and Interfaces, 11(4), 4500-4506.

Journal Article Type Article
Acceptance Date Jan 3, 2019
Online Publication Date Jan 3, 2019
Publication Date Jan 30, 2019
Deposit Date Mar 13, 2019
Publicly Available Date Mar 13, 2019
Journal ACS Applied Materials and Interfaces
Print ISSN 1944-8244
Electronic ISSN 1944-8252
Publisher American Chemical Society
Peer Reviewed Peer Reviewed
Volume 11
Issue 4
Pages 4500-4506
Public URL
Publisher URL


Chemical imaging of buried interfaces in organic-inorganic devices using FIB-TOF-SIMS - Accepted Manuscript (1.9 Mb)

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