Skip to main content

Research Repository

Advanced Search

Microstructural characterisation of TiAlTiAu and TiAlPdAu ohmic contacts to AlGaN/GaN

Fay, Mike W.; Harrison, Ian; Birbeck, J.C.; Hughes, B.T.; Uren, M.J.; Martin, T.; Brown, Paul D.

Microstructural characterisation of TiAlTiAu and TiAlPdAu ohmic contacts to AlGaN/GaN Thumbnail


Authors

Mike W. Fay

Ian Harrison

J.C. Birbeck

B.T. Hughes

M.J. Uren

T. Martin

Paul D. Brown



Contributors

M. Aindow
Editor

C.J. Kiely
Editor

Abstract

Ti/Al/Ti/Au and Ti/Al/Pd/Au contacts to AlGaN/GaN have been investigated to ascertain the effect of annealing temperature on the structural evolution of the contacts. Ti/Al/Ti/Au contacts become ohmic after rapid thermal annealing at 750°C or higher, corresponding to the formation of an interfacial TiN phase, with inclusions penetrating through the AlGaN layer observed after annealing at 950°C. The Pd layer is shown to be more efficient at inhibiting diffusion of Au to the interface than Ti. Ohmic behaviour was not seen with the Ti/Al/Pd/Au scheme. Either the presence of Au at the interface may improve ohmic behaviour, or the Ti:Al ratio is insufficient in this scheme.

Citation

Fay, M. W., Harrison, I., Birbeck, J., Hughes, B., Uren, M., Martin, T., & Brown, P. D. Microstructural characterisation of TiAlTiAu and TiAlPdAu ohmic contacts to AlGaN/GaN. In M. Aindow, & C. Kiely (Eds.), Electron microscopy and analysis 2001: proceedings of the Institute of Physics Electron Microscopy and Analysis Group Conference, University of Dundee, 5-7 September. IOP Publishing Ltd

Deposit Date May 19, 2011
Publicly Available Date Mar 29, 2024
Peer Reviewed Peer Reviewed
Issue 168
Series Title Institute of Physics conference series
Book Title Electron microscopy and analysis 2001: proceedings of the Institute of Physics Electron Microscopy and Analysis Group Conference, University of Dundee, 5-7 September
ISBN 9780750308120
Keywords TEM, TiAlTiAu, TiAlPdAu, AlGaN/GaN, ohmic contact
Public URL https://nottingham-repository.worktribe.com/output/1023317
Related Public URLs http://iopscience.iop.org/

Files





You might also like



Downloadable Citations