Lateral error compensation for stitching-free measurement with focus variation microscopy

P�rez, Pablo; Syam, Wahyudin P.; Antonio Albajez, Jos�; Santolaria, Jorge; Leach, Richard

doi:10.1088/1361-6501/ab046e

Lateral error compensation for stitching-free measurement with focus variation microscopy

P�rez, Pablo; Syam, Wahyudin P.; Antonio Albajez, Jos�; Santolaria, Jorge; Leach, Richard

Authors

Pablo P�rez

Wahyudin P. Syam

Jos� Antonio Albajez

Jorge Santolaria

Professor RICHARD LEACH RICHARD.LEACH@NOTTINGHAM.AC.UK
CHAIR IN METROLOGY

Abstract

This paper proposes a practical methodology to quantify and compensate lateral errors for focus variation microscopy measurements without stitching. The main advantages of this new methodology are its fast and simple implementation using any uncalibrated artefact. The methodology is applied by performing measurements with multiple image-fields with and without stitching on an uncalibrated artefact and using the stitched measurements as reference. To quantify the lateral errors, the determination of their geometrical components is carried out through kinematic modelling. With the quantified errors, compensation can be applied for lateral measurements without stitching. Over the entire 200 mm lateral range, the lateral errors without stitching and without compensation can reach up to 180 µm. With the proposed error compensation methodology, the lateral errors have been reduced to around 15 µm. The proposed methodology can be applied to any Cartesian-based optical measuring instrument.

Citation

Pérez, P., Syam, W. P., Antonio Albajez, J., Santolaria, J., & Leach, R. (2019). Lateral error compensation for stitching-free measurement with focus variation microscopy. Measurement Science and Technology, 30(6), Article 065002. https://doi.org/10.1088/1361-6501/ab046e

Journal Article Type	Article
Acceptance Date	Feb 5, 2019
Online Publication Date	Apr 16, 2019
Publication Date	2019-06
Deposit Date	Feb 6, 2019
Publicly Available Date	Jun 11, 2019
Journal	Measurement Science and Technology
Print ISSN	0957-0233
Electronic ISSN	1361-6501
Publisher	IOP Publishing
Peer Reviewed	Peer Reviewed
Volume	30
Issue	6
Article Number	065002
DOI	https://doi.org/10.1088/1361-6501/ab046e
Keywords	error compensation; focus variation microscopy; lateral motion stage; accuracy
Public URL	https://nottingham-repository.worktribe.com/output/1522933
Publisher URL	https://iopscience.iop.org/article/10.1088/1361-6501/ab046e
Additional Information	Journal title: Measurement Science and Technology; Article type: paper; Article title: Lateral error compensation for stitching-free measurement with focus variation microscopy; Copyright information: © 2019 IOP Publishing Ltd; License information: cc-by Original content from this work may be used under the terms of the Creative Commons Attribution 3.0 licence. Any further distribution of this work must maintain attribution to the author(s) and the title of the work, journal citation and DOI.; Date received: 2018-10-02; Date accepted: 2019-02-05; Online publication date: 2019-04-16
Contract Date	Feb 6, 2019